FAcilities

The efforts to build the BUMEMS laboratory at the department of electrical-electronics engineering have started on September 2005 by Senol Mutlu. Laboratory is expanded to BUMEMS II in the summer of 2011.

Center for the Development of Microsystem Based Medical Devices at Kandilli Campus finished in 2011. This center is a 250 m2 cleanroom consisting of class 1000 (ISO 6) and 10000 (ISO 7) rooms.

Picture taken in 2011. Oxygen plasma cleaner and flood exposure unit is purchased and installed.

BUMEMS I at North Campus

Founded in the Summer of 2011 for Fast Prototyping, Office Space and More.

BUMEMS II at North Campus

Center for the Development of Microsystem Based Medical Devices At Kandıllı Campus

Arias Wetbench I (two hotplates, ultrasonic cleaner, spin-dryer, DI water overflow rinsers with resistiviy monitors) (on the leftt), Arias Wetbench II (two hotplates, spin-dryer, DI water overflow rinsers with resistiviy monitors) (on the right)

Entrance of the cleanroom (on the left) ve cleanroom 1 (lithography room, on the right)

Cleanroom 2 (for dry etching, on the left) and cleantoom 3 (for wet etching, on the right)

DC and RF Magnetron Sputtering System with 4 heads and mass flow controllers (on the left), spin coater and hotplate, Cee200cbx (on the right)

EVG620 contact aligner with backside alignment (on the left), March Plasma AP300 Oxygen Plasma Cleaner (on the right)

BogazIcI UnIversIty

MIcro Electro MechanIcal Systems

(BUMEMS)